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SPSM Series

SPSM Series

The main parameters of SPSM series probe stage are sample holder size: 2 inches, 4 inches; number of probe arms 6; sample environment in the atmosphere, temperature range: room temperature.SPSM series compact room temperature manual probe stage is an affordable, entry-level probe stage, capable of carrying out a large number of non-destructive, standard electrical experiments on 2-inch and 4-inch wafers, with the external connection of different test equipment to complete the electrical characteristics measurement, parametric measurement, DC measurement of the electrical characteristic measurements, parameter measurements, and DC measurements of the devices. The compact desktop design is the choice for academic and experimental research.

SPSM Series Overview

  The main purpose of the Compact Room Temperature Manual Probe Station is to provide a test platform for the electrical parameter testing of semiconductor chips, with different external measuring instruments, which can be used to complete the testing of integrated circuits such as voltage, current, resistance, and capacitance-voltage characteristic curves, etc., and is used for the non-destructive testing of ultra-small chip wafers and devices at room temperature.


  SPSM Series Compact Room Temperature Manual Probe Table is an affordable, entry-level probe table capable of performing a large number of non-destructive, standard electrical experiments on 2-inch and 4-inch wafers, and external different test equipment can be used to complete electrical characterisation, parametric and DC measurements on devices. The compact desktop design is the choice for academic and experimental research.


Features:
- Sample holders can hold 4" wafer samples.
- Under-mounted displacement holder allows for fine 3D displacement of the holder for easy sample testing and sample changeover.
- 6 probe arms can be mounted
- The probe arms are magnetised and can be moved arbitrarily, and can be fine-tuned in three dimensions for easy operation and accurate pinning, and the probes of the four arms can be pinned to any position of the sample.
- The probe arm adopts tri-coaxial cable and tri-coaxial connector, the leakage current is small, within 100fA.
- CCD magnification is 180 times, working distance is 100mm.

SPSM Series Technical Parameter


Model classification:

ModelSample seat size
SPSM-2
2 inches
SPSM-4
4 inches
Parameters and indicators:
Sample holder
Chuck size
2/4 inches, customizable
Material
Oxygen-free copper gold plating
Sample fixation method
The porous zonal adsorption has three separately controlled gas adsorption channels: the outer ring, the inner ring and the middle
Displacement stroke
X-±6.5mm,Y-±6.5mm,Z-±5mm
Reading accuracy
10μm
Probe arm
Fixed method
Magnetic attraction
XYZ fine-tuning movement stroke
XYZ-13mm
Reading accuracy
10μm
Number of probe arms
It can install 6 probe arms (3 on each side).
Electrical cables
Three-coaxial cable
Leakage current
100fA
Probe type
Dc probe
Optical system
Microscope magnification
50 to 1000 times
Working distance of the microscope
90-100mm
Microscope resolution
The smallest recognizable size is 3μm
Optional
Optical platform/DC probe/microwave probe/sample holder/shielding box/optical fiber



SPSM Series Basic Configuration

Semiconductor
IC
Wafer

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