Room temperature permanent magnet probe stage for semiconductor chip electrical parameter testing to provide a test platform, external different measuring instruments, with the measuring instrument can be completed with the integrated circuit voltage, current, resistance, and capacitance-voltage characteristic curve and other parameters of the test. In addition, it can be used to measure carrier concentration, mobility, resistivity, Hall coefficient and other important Hall parameters of semiconductor materials. Non-destructive testing of chips, wafers and devices at room temperature.
PSPM Series Room Temperature Permanent Magnet Probe Stage is a probe stage specially developed for the room temperature vertical magnetic field electrical measurement environment, providing 0.5T vertical magnetic field, capable of 2", 4", 6", 8" wafers for repetitive, standard electrical experiments, external different test equipment can be completed on the device's electrical characteristics of the measurement, parametric measurements, DC measurements, RF measurements, and Hall measurements.
Features：
- The sample holder can hold 8-inch wafer samples, by moving the slide under the sample holder, it can achieve the X-Y axis ±100mm travel, and the sample holder itself can be finely adjusted in three dimensions, which makes the sample test and sample change more convenient.
- The base of the probe arm is fixed with a magnet, allowing the probe to be adjusted in three dimensions, X-Y-Z, and with the sample holder's shift adjustment, the probe can be quickly inserted into any position of the 8-inch sample.
- The probe arm is made of triaxial cable and triaxial connector, with low leakage current within 100 fA, and built-in cable to avoid messy wiring.
- The probe is fixed with a needle sleeve, only the tip of the needle is exposed, reducing the leakage of electricity.
- The permanent magnet adopts electric control, can realise the forward and backward turning movement.
- The permanent magnet holder and the probe stage are separated from each other to avoid vibration transmission to the sample when the magnet is in motion.
- Sample fixing method adopts porous partition adsorption, there are three individually controlled gas adsorption channels in the outer ring, inner ring and the middle, which can adsorb and fix 1mm*1mm samples.
