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PSM-SM Series

PSM-SM Series

PSM-SM Cryogenic Probe Stage is a closed-cycle superconducting magnet probe stage with ±3T superconducting magnets that provides a 10K-500K high and low-temperature vacuum test environment for electrical parameter testing of semiconductor chips. It can perform all standard IV, CV, microwave and photovoltaic experiments, as well as superconducting perpendicular field measurements, and allows researchers to perform Hall measurements and magnetotransport measurements. The PSM-SM can be designed for 90° measurements on 2" diameter samples, which can be kept hot during cooling to reduce the tendency to condense, especially important for testing organic materials. Superconducting Magnet Cryogenic Probe Stations PSM-SM series, please contact online customer service for specific parameters!

PSM-SM Series Overview

    The PSM-SM series low-temperature strong magnetic comprehensive probe station operates completely without liquid helium and uses a closed cycle refrigeration machine for cooling. Precise temperature control is achieved through the PID closed-loop circuit of the temperature controller, and multiple magnetic field strengths are available for selection. In terms of electrical signals, equipped with high-precision probes and optical microscopes, it is very easy to switch between different devices on the sample by adjusting the probe arm needle. By connecting different measuring instruments or self selected modules, this probe station can complete non-destructive electrical testing of various electrical parameters such as IV, CV, and microwave under low temperature and strong magnetic conditions of materials and devices, greatly improving the efficiency and convenience of researchers in exploring micro nano devices or material property mechanisms.
    The PSM-SM series low-temperature strong magnetic comprehensive probe station performs excellently in optical compatibility and functional scalability, with high-precision optical adaptation and multi-dimensional optical path access. It can flexibly introduce incident light from different angles through top and side window structure design, meeting complex optical testing needs.
    The PSM-SM series low-temperature strong magnetic comprehensive probe station has extremely flexible configurations, providing rich and diverse expansion modules to meet different scientific research and testing needs, and helping to achieve various comprehensive measurements. Conventional expansion options include: basic microscope optical options, photocurrent testing options, magneto-optical Kerr testing options, Raman options, basic material electrical measurement options, micro nano device testing options, Hall effect measurement options, SOT measurement options, etc.
    The PSM-SM series low-temperature strong magnetic comprehensive probe station integrates excellent features such as high magnetic field, wide temperature range, closed-loop cooling, and low vibration technology. A set of PSM-SM system can achieve in-situ measurement of electric optical magnetic temperature multimodality, meeting the requirements of cross scale characterization of MEMS and other devices. It is an ideal choice for conducting multi physics field coupling testing in the laboratory.


Feature:

• Ultra-low temperature, strong magnetic field

• low vibration

• Probe testing is convenient and quick

• The sample space is large

• Strong compatibility and scalability

PSM-SM Series Technical Parameter

Parameters and configuration:

Probe station host classification
model
PSM-SM-3
PSM-SM-7
PSM-SM-3-1-1
Magnetic field control
direction of magnetic field
vertical
vertical
vector
Maximum magnetic field strength
3T
7T
3-1-1T
magnet
solenoid
Split coil
Vector magnet
Magnetic field uniformity

± 1% (circle with a 

diameter of 25mm)

± 0.5% (ball with a 

diameter of 25mm)

N/A
Temperature control
temperature range
2-300K (without probe arm installed)
temperature stability
±50mK
Cooldown
~15 hours
~30 hours
~30 hours
cold source
GM Refrigerator (Standard)
Vibration
vibration(RMS)

<500nm (standard system)
<50nm (low vibration option)


OPTICAL WINDOW
Top window of vacuum chamber

1 standard quartz window, 50mm diameter, working distance 15mm,

 supporting combination with 50X telephoto objective lens

Anti radiation screen window
1 infrared absorption window
Optional side window
Up to 7 side windows with a diameter of 30mm can be opened
Standard CCD imaging system
Microscope magnification
10-180 times
resolution
3μm
Vacuum
Vacuum chamber material
aluminum alloy
Radiation shielding material
aluminum alloy
Chamber volume
48L
58L
70L
Overall dimensions1000*1000*600
1200*1200*600
1200*1200*600
Inner diameter of cavity420mm
460mm
500mm
degree of vacuum~10-6 torr @ base temperature
reserved interface
7 of them
Optional probe arm
Optional specifications
DC probe arm
Microwave probe arm
Fiber optic probe arm
quantity
Up to 6 can be paired
Displacement range
X+/- 35mm,Y+/- 12.5mm Z +/-6.5mm
Detectable area
1 inch

PSM-SM Series Basic Configuration

Semiconductor
IC
Wafer

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