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HSMC-10

HSMC-10

The HSMC-10 Multi-Channel Hall Test System provides a magnetising environment for multi-electrode cylindrical ingots, D-type ingots and large wafers.

HSMC-10 Overview

The HSMC-10 Multi-Channel Hall Test System is capable of providing a demagnetised environment for multi-electrode cylindrical ingots, D-type ingots and large wafers. The system has a 77K liquid nitrogen single-point option that provides samples to complete Hall effect measurements at a low temperature of 77K. With the Hall tester, it can accurately measure the electrical properties of low mobility materials can be used in electromagnetic field, liquid nitrogen cryogenic environment (77K), a variety of types of samples for rapid automated testing, in order to obtain the Hall parameters of the samples, including the resistivity of the samples to be tested, the Hall voltage, the Hall coefficient, the carrier concentration, the Hall mobility and the type of carrier, etc., to fill the traditional Hall test instrument can only measure the preparation of the sample The Hall parameters of the sample to be tested are obtained.


features:
- With industry-advanced fast Hall effect test function and data analysis function, greatly reducing the measurement time;
- Matrix switch to achieve free switching and selection between test electrodes, suitable for multi-electrode samples;
- Customisable solenoid can achieve large magnetic field uniform area, suitable for large samples;
- With 24 electrodes automatic selection, switching test and data analysis function;
- With 0.1T ~ 1T wide range of magnetic field adjustment interval, fast zero magnetic field control function;
- With automatic injection function, can support up to 1kg to be tested sample automatic injection;
- With a wealth of sample test support options, can measure cylindrical ingots, D-type ingots, wafers (2-inch, 4-inch and 6-inch) and other samples of various shapes and sizes;
- With data acquisition, collation, analysis and output functions, as well as report customisation and export functions;
- System scalability, upgraded to support up to 32 electrode automatic switching test.
- Testing temperature: room temperature or 77K liquid nitrogen low temperature; 

HSMC-10 Technical Parameter

Parameters and indicators:

Measurement parameters
Dimensions of the sample to be tested 
Supports 6 inches or larger, compatible with 4 inches and 2 inches
Mobility
0.01~1×106cm2/Vs
Standard resistance measurement range
10mΩ ~ 10MΩ
Low-temperature zone 77K
Minimum R2 of Hall test
0.9999
Matrix switch parameters
Switch type
EMR
Passage
A total of (4 banks ×16CH/Bank) channels: 4 groups, with 1 cut of 16 in each group
Switching Time (Typ)
6ms
Switching carrying voltage
300VDC/250VAC
Switch carrying current
Switching current/continuous current: 1A, pulse current: 6A@100ms
Sample type
Cylindrical crystal ingot
Cylindrical crystal ingots are cylindrical or quasi-cylindrical in shape, and there can be multiple electrodes on the crystal ingot
D-type crystal ingot
It is obtained by cutting in half along the axis of a cylindrical crystal ingot, and there may be multiple electrodes on the crystal ingot
Wafer
2-inch, 4-inch and 6-inch samples
Electromagnet
Magnetic field range
0.1T~1T@50A(Φ300mm polar surface, fixed air gap 75mm center)
Magnetic field step size10Gs
Magnetic field uniformity

The central magnetic field of the 75mm air gap is better than that of 1.0T@50A(φ300mm pole surface) for 30 minutes of operation
Uniform zone Φ150*30mm, uniformity 1%
Uniform zone Φ200*50mm, uniformity 5%
1%@ (30*Φ150mm), 5%@ (50*Φ200mm), weight: 2337KG


Electromagnet power supply
Output power
10 kW @ AC 380 V ±10%(50 ~60 Hz)
Output current
50 A
Weight
30 kg
Two-dimensional stepper motor
Horizontal X stroke
400mm
Vertical Z-stroke (with brake)
700mm
77K liquid nitrogen single-point system
Liquid nitrogen volume
Approximately 3.38 liters
Internal dimensions of the thermostat (mm)
190*54*33
Test temperature
Room temperature and 77K liquid nitrogen single point


HSMC-10 Basic Configuration

Semiconductor
IC
Wafer

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