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PSM-4K Series

PSM-4K Series

PSM-4K series cryogenic probe station is a closed-cycle cryogenic probe station, compact and low vibration design, can provide a <5K-350K high and low temperature vacuum test environment for semiconductor chip electrical parameter testing.

PSM-4K Series Overview

    The 4K closed-loop low-temperature probe station plays a crucial role in scientific research and technological development. It can perform various non-destructive physical and electrical performance tests on samples at low temperatures, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, and providing important data support for the development and application of new materials.
    The PSM-4K series low-temperature probe station is a high-performance closed-loop low-temperature probe station. Its compact and low vibration design provides a high and low temperature vacuum testing environment of<5K-350K for electrical parameter testing of semiconductor chips. Adopting closed-loop refrigeration, no liquid helium consumption is required, with a temperature of 4.5K.


Feature
• Adopting closed-loop refrigeration, no liquid helium consumption is required, with a temperature of 4.5K.
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without damaging the vacuum.
• Unique probe arm X-Y-Z-R four-dimensional adjustment, capable of testing 4-inch samples.
• The material of the vacuum chamber is aluminum, which can effectively reduce external electromagnetic interference, improve the accuracy and stability of testing.
• The probe arm adopts a three coaxial connector with good leakage performance, and the measured leakage current is less than 100fA@ 1V@4.5K-350K.
• The testing temperature range is wide, supporting continuous temperature changes from 4.5K to 350K.
• The uniquely designed flexible probe is mounted on a copper spring to avoid damage to the sample or electrode caused by excessive force during the needle insertion process.


Test data

Leakage current test data:

Temperature curve:

PSM-4K Series Technical Parameter

Parameters and indicators:

PSM-4K Series Basic Configuration

Semiconductor
IC
Wafer

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