The liquid nitrogen high and low temperature probe station plays a crucial role in scientific research and technological development. It enables various non-destructive physical and electrical property tests on samples in a low temperature environment, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, thereby providing important data support for the research, development, and application of new materials.
The PSM-LN2 series liquid nitrogen high and low temperature probe station provides a high and low temperature vacuum testing environment ranging from 80K to 800K for electrical parameter testing of semiconductor chips. By connecting different external electrical measurement instruments, it can complete parameter detection of integrated circuits such as voltage, current, resistance, and IV curves, and is used for non-destructive electrical testing of chips, wafers, and devices in a low-temperature vacuum environment.
Feature
• Liquid nitrogen high and low temperature vacuum probe station, capable of achieving a vacuum degree of 10E-4 torr within 15 minutes, with low liquid nitrogen consumption, requiring only 0.2L of liquid nitrogen to reach the lowest temperature, offering convenience, speed, and cost-effectiveness;
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without breaking the vacuum;
• Unique probe arm with X-Y-Z-R four-dimensional adjustment, capable of testing samples up to 4 inches in size;
• The vacuum chamber is made of aluminum material, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of testing;
• The probe arm adopts a tri-coaxial connector, which has good leakage performance, with a measured leakage current of less than 100fA @1V@80K--800K;
• Wide testing temperature range, supporting continuous temperature variation from 80K to 800K;
• The upper cover adopts a flip-style structure, making sample changing more convenient.
Test data：
Leakage current test data：
Temperature curve：
