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PSEM Series

PSEM Series

PSEM Series Room Temperature Electromagnet Probe Stage is a probe stage specially developed for room temperature variable magnetic field electrical measurement environment, providing ±0.6T vertical magnetic field or ±0.3T horizontal magnetic field, capable of 2 inch, 4 inch wafer repeatability, standard electrical experiments, external different test equipment can be completed on the device's electrical characteristics, parametric measurements, DC measurements, RF measurements, and Hall measurements.

PSEM Series Overview

  The Room Temperature Electromagnet Probe Stage not only performs the tests that can be done with a permanent magnet probe stage, but also provides a variable magnetic field for sample testing with a stronger magnetic field and a larger uniform magnetic field zone. This Probe Stage is designed for experiments that require continuous magnetic field variation during the measurement process and non-destructive testing of chips, wafers and devices at room temperature.


  PSEM Series Room Temperature Electromagnet Probe Stage is a probe stage specially developed for room temperature variable magnetic field electrical measurement environment, providing ±0.6T vertical magnetic field or ±0.3T horizontal magnetic field, capable of 2 inch, 4 inch wafer repeatability, standard electrical experiments, external different test equipment can be completed on the device's electrical characteristics, parametric measurements, DC measurements, RF measurements, and Hall measurements.


Features:
- The sample holder can hold 4-inch wafer samples. By moving the slide under the sample holder, it can achieve ±50mm travel in X-Y axis, and the sample holder itself can be finely adjusted in three dimensions, which makes the sample testing and sample changing more convenient.
- The base of the probe arm is fixed with a magnet, allowing the probe to be adjusted in three dimensions, X-Y-Z, and with the sample holder's shift adjustment, the probe can be quickly inserted into any position of the 4-inch sample (6 probe arms can be mounted, and 4 horizontal magnetic field electromagnets can be mounted in the probe table).
- Probe arm with triaxial cable and triaxial connector, small leakage, leakage current within 100fA, probe arm built-in cable to avoid messy wiring.
- The probe is fixed with needle sleeve, only the tip of the needle is exposed, reducing the leakage of electricity.
- Electromagnet bracket and probe stage adopt separate isolation bracket to avoid vibration transmission to the sample when the magnet is moving.
- Sample fixing method adopts porous partition adsorption, there are three individually controlled gas adsorption channels in the outer ring, inner ring and the middle, which can adsorb and fix 1mm*1mm samples.
- CCD magnification of 180 times, working distance of 100mm.

PSEM Series Technical Parameter

Model classification:

Model PSEM-2H(Horizontal Magnetic Field)
PSEM-2V(Vertical Magnetic Field)
PSEM-4V(Vertical Magnetic Field)
Sample seat size2 inches2 inches4 inches

Parameters and indicators:

Sample holder
Chuck size
2/4 inches, customizable
Material
Oxygen-free copper gold plating
Sample fixation method
The porous zonal adsorption has three separately controlled gas adsorption channels: the outer ring, the inner ring and the middle
滑台
X-Y movement stroke
2/4 inch :±50mm (Horizontal magnetic field probe station without slide table)
Movement accuracy
10μm
探针臂
X-Y-Z movement stroke
X-13mm,Y-13mm,Z-13mm
Degree of rotation
360-degree free rotation
Movement accuracy
10μm
Number of probe arms
The vertical magnetic field electromagnet probe station can be installed in six units. Four horizontal magnetic field probe stations can be installed
Electrical cablesThree-coaxial cable
Leakage current
100fA
Probe type
Dc probe
Optical system
Microscope magnification
10 to 180 times
Working distance of the microscope
90-100mm
CCD camera resolution
38 million pixels
Electromagnet assembly (vertical magnetic field)
Magnet model
EM-60V
Magnetic field magnitude
±0.6T
Magnet spacing
30mm
Pole post
The diameter is 60mm, and it comes standard with a pair of 50mm pure iron terminals
Circulating water cooling
Electromagnet assembly (horizontal magnetic field)
Magnet model
EM-30H
Magnetic field magnitude
±0.3T
Magnet spacing
60mm
Pole post
It comes standard with a pair of 60mm pure iron terminals
Circulating water cooling
Optional
Optical platform/DC probe/microwave probe/sample holder/shielding box/optical fiber


PSEM Series Basic Configuration

Semiconductor
IC
Wafer

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