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PSM-65K Series

PSM-65K Series

PSM-65K Low Temperature Probe Stage, using a small low vibration closed-cycle refrigeration, without the need to consume liquid helium, the temperature of 65K, vibration is less than 1 μm, a wide range of test temperatures to support the 65K-350K continuous temperature change, low power consumption, input power of 320W.

PSM-65K Series Overview

  Cryogenic Probe Stations play a vital role in scientific research and technology development. It is capable of performing various non-destructive physical and electrical property tests on samples in a low-temperature environment, which helps researchers gain an in-depth understanding of the various physical and electrical properties of materials or devices, thus providing important data support for the development and application of new materials.


  PSM-65K Cryogenic Probe Station is an economical and compact closed-cycle cryogenic probe station with compact and low vibration design, which can provide a <65K-350K high and low-temperature vacuum test environment for electrical parameter testing of semiconductor chips, and by connecting with different electrical measurement instruments, it can complete the testing of materials/devices with parameters such as IV, CV, optics, and microwave, etc., and realise non-destructive electrical testing of chips, wafers and devices in a low-temperature vacuum environment. Non-destructive electrical testing of chips, wafers and devices under low-temperature vacuum environment.


Features:
- Uses small, low-vibration closed-cycle refrigeration without liquid helium consumption at 65K.
- Vibration is less than 1μm.
- Wide test temperature range, support 65K-350K continuous temperature change.
- Low power consumption, input power 320W.
- Probe arm displacement adjustment is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- The unique four-dimensional X-Y-Z-R adjustment of the probe arm allows for testing of up to 4-inch samples.
- The probe arm adopts tri-coaxial connector with good leakage performance, measured leakage current is less than 100fA @1V@65K-350K.
- The vacuum cavity is made of aluminium, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.

PSM-65K Series Technical Parameter

Parameters and indicators:

Classification of probe station mainframes
modelPSM-65K-2
PSM-65K-4
temperature range
65K-350K
temperature control stability
+/-50mK
vibration
<1μm
sample holder
Type and Material
Oxygen-free copper grounding gold-plated sample holder
size
2 inches
4 inches
Optional configuration

Insulating sample holder (temperature can only reach 400K)
Coaxial sample holder (temperature can only reach 400K)
 Three-coaxial sample holder (temperature limited to 400K)


probe arm
type
DC probe arm
quantity
4
connector and cable
Three coaxial connectors + ultra-thin coaxial low-temperature cable
leakage current
100fA@1V in a vacuum environment
signal frequency
DC-50MHz
matching impedance
50Ω
displacement rangeX+/- 35mm,Y+/- 12.5mm,Z +/-6.5mm R+/-10°
X+/- 50mm,Y+/- 12.5mm,Z +/-6.5mm R+/-10°
optical system
Microscope magnification
10-180times
resolution
3μm
field of view
22mm
working distance
90-100mm
vacuum chamber
material
aluminum alloy
chamber volume
4L
5.5L
Overall dimensions
800*800*600
900*900*600
cavity inner diameter
124mm
155mm
window size
50mm
100mm
Vacuum chamber window
Standard quartz window
Radiation-proof screen window
Infrared absorption window
degree of vacuum
5E-4 torr
reserved interface
2 probe arm interfaces & 2 electrical interfaces
Radiation-proof screen material
stainless steel
Radiation-proof screen material
60 minutes to 77K
100 minutes to 77K
cold source
Stirling cryocooler
Dedicated vibration isolation table
size
800*800*800
900*900*800
table push
Fixed foot & roller

PSM-65K Series Basic Configuration

Semiconductor
IC
Wafer

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